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Journal of Metals, Materials and Minerals

Publication Date

2024

Abstract

WO3 films were prepared from annealed W films by anodization and annealing at 450℃ for 1 h. The sputtered W films were annealed before anodization at different times for 0.5 h to 2 h, followed by immediate removal from the furnace (quenching) or slow cooling (cool-down). The WO3 films exhibited a different preferred orientation between the (200) and (222) planes. The morphological structure of the WO3 films depended on the annealing time and cooling features of the W films. The WO3 films for the cool-down condition had smaller grains and more pores than the quenching condition. The WO3 films prepared from annealed W for 1.5 h with cool-down showed maximum transmittance change of 48.20% with the diffusion coefficient of 3.533 x 10-7 cm2∙s‒1. The quenching condition can be improved durability of WO3 films. Therefore, annealing time and cooling conditions can be used to design film properties that are suitable for the electrochromic application.

DOI

10.55713/jmmm.v34i2.1969

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