Journal of Metals, Materials and Minerals

Publication Date



Diamond-like carbon (DLC) films were prepared on AISI H13 hot-work tool steel substrates by filtered cathodic vacuum arc (FCVA) technique under variable substrate DC biasing. The atomic structures of the films were investigated by Raman spectroscopy, X-ray photoelectron spectroscopy, and near edge x-ray absorption fine structure spectroscopy. The Raman spectra revealed that when the magnitude of the bias voltage increased, the G peak was shifted toward lower wave numbers, and indicated that the sp3 content in the DLC films increased. The ratios between the sp3 and sp2 bonds in the films were verified by X-ray photoelectron spectroscopy, and the analyses from near-edge x-ray absorption fine structure measurements demonstrated the mixture of the sp3, sp2 bonds together with C-O, C-H bonds, and the amorphous structure in the DLC films.

First Page


Last Page




To view the content in your browser, please download Adobe Reader or, alternately,
you may Download the file to your hard drive.

NOTE: The latest versions of Adobe Reader do not support viewing PDF files within Firefox on Mac OS and if you are using a modern (Intel) Mac, there is no official plugin for viewing PDF files within the browser window.